Optically isolated solid-state relays (SSRs) (also called optocouplers or photovoltaic relays) were developed to overcome ...

In order to provide academic steering for the design of stepping and scanning lithography and settle the vibration problems of the key part caused by the high speed motion of the wafer stage and the ...

This paper presents the development of an active 3-degree-of-freedom (DoF) vibration isolation system using zero-power magnetic suspension. The developed system is capable to suppress direct ...