No cleanroom, no photomask—just precision optics and photoresist. This DIY method brings semiconductor-scale patterning into ...

Fujifilm announced its plan to strengthen its business in materials for semiconductor back-end processes at a semiconductor ...

On-line statistical process control (SPC) has been implemented on a single-wafer remote microwave plasma photoresist asher. SPC for ashing is made more difficult because the prior processes, e.g., ion ...