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Setco is the largest independent facility in precision spindle manufacturing in the U.S. With over 100 years of industry experience, it offers a comprehensive line of belt-driven, motorized, and ...
Using this kind of comb capacitor, a bulk micromachined torsional z-axis accelerometer is designed. The accelerometer is fabricated using a silicon/glass wafer bonding and deep reactive ion etching ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for detecting accelerations in the consumer and automotive market. Both capacitive and resonant sensing have ...