Fig. 1 | Metalens-based DLW lithography. Schematic diagrams of (a) the DLW lithography setup, (b) the metalens and its constructing unit cells. (c) The metalens in top view and cross-section view.

Their study was published in Laser & Photonics Reviews. Photolithography plays a crucial role in the manufacture of integrated circuit chips and is one of the key core technologies in the ...

Standard photolithography techniques produce various micropatterns but are limited to a feature size of approximately a micron 1. To overcome this limitation, conventional nanolithography ...

Photolithography Equipment Market report contains detailed information on factors influencing demand, growth, opportunities, challenges, and restraints. It provides detailed information about the ...

Their study was published in Laser & Photonics Reviews. Photolithography plays a crucial role in the manufacture of ...

This array was used for the first time in a deep ultraviolet (DUV) maskless photolithography system. Photolithography is essential to producing integrated circuit chips, one of the fundamental ...