The Institute of Optics and Electronics under the Chinese Academy of Sciences announced on Thursday that it has developed its own photolithography machine. [Photo/IC] "Make it small" has been the ...

The Institute of Optics and Electronics under the Chinese Academy of Sciences announced on Thursday that it has developed its own photolithography machine, thus overcoming one of the major ...

Excimer lasers are extensively used in high-resolution photolithography machines used for microelectronic chip manufacturing. Current photolithography tools use deep UV light from KrF and ArF ...

Inside the Tech Cold War's'most complicated machine' that remains well out ... 9779351.html ASML manufactures equipment for performing 'photolithography ' that forms ultra-small circuits on ...