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Now, most of the DIY semiconductor efforts we’ve seen start with photolithography, ... meaning the electron beam would be turned on even while moving across areas that weren’t to be exposed.
Both electron beam lithography (EBL) and traditional lithography methods (like photolithography) have their strengths and weaknesses, making them suitable for different applications.
Candidates for next-generation lithography include: extreme ultraviolet lithography (EUV-lithography), X-ray lithography, electron beam lithography, focused ion beam lithography, and nanoimprint ...
E-beam lithography operates on principles similar to photolithography but provides significantly higher resolution. The process begins with coating a substrate with an electron-sensitive resist ...
Electron beam (e-beam) lithography uses a scanning electron microscope (SEM) to expose a substrate to an extremely small and precisely position controlled high energy electron beam. When the substrate ...
Unlike photolithography and electron beam lithography, which utilize light or electron beams to modify the resist's properties, nanoimprint lithography mechanically deforms the resist using a stamp or ...
For years, scientists have known that phonons (vibrations of atoms) carry heat through solids. However, when two different ...
A groundbreaking achievement in particle physics has been made at the SLAC National Accelerator Laboratory in Menlo Park, ...
However, it requires high-quality master stamps, which are usually produced using electron beam lithography. In a new paper published in Light: Advanced Manufacturing ("Feature size below 100 nm ...
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