ASML added that the Dutch export license requirement was already in place for the TWINSCAN NXT:2000i and subsequent DUV immersion systems. ASML said that since it is a technical change ...

Until recently, ASML was still permitted to sell DUV systems like the Twinscan NXT:2000i. SMIC has modified these devices to produce 7nm chips, and some reports have claimed 5nm is possible.